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AASCIT Journal of Nanoscience

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Structural-Parametric Model of Piezoactuator Nano - and Microdisplacement for Nanoscience

AASCIT Journal of Nanoscience
Vol.3 , No. 3, Publication Date: Aug. 30, 2017, Page: 12-18

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Authors

[1]	Sergey Mikhailovich Afonin, Department of Intellectual Technical Systems, National Research University of Electronic Technology (MIET), Moscow, Russia.

Abstract

The structural-parametric model, the parametric structural schematic diagram, the decision of the wave equation, the transfer functions of the piezoactuator for the nanoscience are obtained. The effects of geometric and physical parameters of the piezoactuator and the external load on its static and dynamic characteristics are determined. The parametric structural schematic diagram and the transfer functions of the piezoactuator for the transverse, longitudinal, shift piezoelectric effects are obtained from the structural-parametric model of the piezoactuator. For calculation of the control systems for nanotechnology with the piezoactuator it’s the parametric structural schematic diagram and the transfer functions are determined. The generalized parametric structural schematic diagram of the piezoactuator is constructed.

Keywords

Structural-Parametric Model, Piezoactuator, Schematic Diagram, Deformation, Generalized Transfer Functions

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